An APIX mass spectrometer is used to detect traces of gas impurities in the nitrogen, argon, hydrogen and helium carrier gases used in the electronics industry. One ppt (part per trillion) of impurity may be detected.

Patented mono, bi and multi-gas units have now been installed in semiconductor fabrication plants all over the world.

Checking corrosion and passivation on materials and components: this research is conducted in Japan through various gas distribution systems to increase the service life of semiconductors.

The various R & D projects underway in this area help expand our offer to include the specific point-of-use purity characteristics required in this industry.

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