| Semiconductors |
| Oxygen |
Used
ultra pure to oxidize certain materials |
| Nitrogen |
Used
ultra-pure for overall protection against impurities and oxidation |
| Argon |
Used
ultra-pure to protect against impurities |
| Hydrogen |
Used
ultra pure to reducing certain materials |
| Other gases |
Specialty
gases: such as ultra-pure silane used for silicon deposition |
Performance
Health
Safety
Environment
|